SURFACE DEFORMATION MEASUREMENTS FOLLOWING EXCIMER LASER IRRADIATION OF INSULATORS

被引：15

作者：

VONGUTFELD, RJ

MCDONALD, FA

DREYFUS, RW

机构：

来源：

APPLIED PHYSICS LETTERS | 1986年 / 49卷 / 17期

关键词：

D O I：

10.1063/1.97474

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1059 / 1061

页数：3

共 12 条

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