RAMAN MICROPROBE ANALYSIS OF TUNGSTEN SILICIDE

被引:23
作者
CODELLA, PJ [1 ]
ADAR, F [1 ]
LIU, YS [1 ]
机构
[1] INSTRUMENTS SA INC,METUCHEN,NJ 08840
关键词
D O I
10.1063/1.95766
中图分类号
O59 [应用物理学];
学科分类号
摘要
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页码:1076 / 1078
页数:3
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