共 29 条
[2]
[Anonymous], MICROELECTRONICS PRO
[6]
Elliott DJ, 1986, MICROLITHOGRAPHY PRO
[7]
Fleishmann M., 1987, ULTRAMICROELECTRODES
[9]
HIGH-RESOLUTION DEPOSITION AND ETCHING OF METALS WITH A SCANNING ELECTROCHEMICAL MICROSCOPE
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1988, 6 (06)
:1873-1876
[10]
HUSSER OH, 1989, J ELECTROCHEM SOC, V36, P3222