HIGH-RESOLUTION DEPOSITION AND ETCHING OF METALS WITH A SCANNING ELECTROCHEMICAL MICROSCOPE

被引:62
作者
HUSSER, OE
CRASTON, DH
BARD, AJ
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 06期
关键词
D O I
10.1116/1.584191
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
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页码:1873 / 1876
页数:4
相关论文
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