DIAMOND FORCE MICROSCOPE TIPS FABRICATED BY CHEMICAL VAPOR-DEPOSITION

被引：24

作者：

GERMANN, GJ

MCCLELLAND, GM

MITSUDA, Y

BUCK, M

SEKI, H

机构：

[1] IBM Research Division, Almaden Research Center, San Jose, CA 95120

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1992年 / 63卷 / 09期

关键词：

D O I：

10.1063/1.1143265

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A chemical vapor deposition method is described for fabricating force microscope cantilevers with single-crystal diamond tips. The congruent-to 1-mu-m-diam diamond tips have corner radii of 30 nm, and have been used to study diamond-diamond friction on well-characterized surfaces in UHV. The tip size and orientation can be determined by electron microscopy without altering the surface atomic structure.

引用

页码：4053 / 4055

页数：3

共 24 条

[1] ATOMIC RESOLUTION IMAGING OF A NONCONDUCTOR BY ATOMIC FORCE MICROSCOPY [J].