SYNTHESIS OF VANADIUM DIOXIDE THIN-FILMS FROM VANADIUM ALKOXIDES

被引：57

作者：

GUZMAN, G

MORINEAU, R

LIVAGE, J

机构：

[1] Chimie de la matière condensée, Université Pierre et Marie Curie, 75252 Paris

来源：

MATERIALS RESEARCH BULLETIN | 1994年 / 29卷 / 05期

关键词：

VANADIUM; SOL-GEL FILMS; THERMOCHROMIC MATERIALS; OXIDES;

D O I：

10.1016/0025-5408(94)90039-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A very simple sol-gel route to vanadium dioxide thin films is described. Vanadium alkoxide molecular precursors are deposited onto a fused silica substrate by the spin coating technique. An amorphous thin film is obtained at room temperature which leads to crystalline VO2 when heated at 450-degrees-C under a reducing atmosphere (Ar-H2). Sol-gel derived VO2 thin films have a good optical transparency. They exhibit a reversible semiconductor-metal transition around 70-degrees-C and their conductivity increases by three orders of magnitude when heated above that temperature.

引用

收藏

页码：509 / 515

页数：7

相关论文

共 17 条

[1] METAL-INSULATOR PHASE-TRANSITION IN VO2 - INFLUENCE OF FILM THICKNESS AND SUBSTRATE [J].

BABKIN, EV ;

CHARYEV, AA ;

DOLGAREV, AP ;

URINOV, HO .

THIN SOLID FILMS, 1987, 150 (01) :11-14

[2] HIGH-CONTRAST OPTICAL STORAGE IN VO2 FILMS [J].

BALBERG, I ;

TROKMAN, S .

JOURNAL OF APPLIED PHYSICS, 1975, 46 (05) :2111-2119

[3] ELECTRIC MOMENTS OF THE SIMPLE ALKYL ORTHOVANADATES [J].

CARTAN, F ;

CAUGHLAN, CN .

JOURNAL OF PHYSICAL CHEMISTRY, 1960, 64 (11) :1756-1758

[4] UNDOPED AND DOPED VO2 FILMS GROWN FROM VO(OC3H7)3 [J].

GREENBERG, CB .

THIN SOLID FILMS, 1983, 110 (01) :73-82

[5] PREPARATION AND OPTICAL-PROPERTIES OF PHASE-CHANGE VO2 THIN-FILMS [J].

LU, SW ;

HOU, L ;

GAN, FX .

JOURNAL OF MATERIALS SCIENCE, 1993, 28 (08) :2169-2177

[6] PREPARATION AND PROPERTIES OF VANADIUM DIOXIDE FILMS [J].

MACCHESNEY, JB ;

POTTER, JF ;

GUGGENHEIM, HJ .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1968, 115 (01) :52-+

[7] VANADIUM DIOXIDE THIN-FILMS PREPARED BY CHEMICAL-VAPOR-DEPOSITION FROM VANADIUM(III) ACETYLACETONATE [J].

MARUYAMA, T ;

IKUTA, Y .

JOURNAL OF MATERIALS SCIENCE, 1993, 28 (18) :5073-5078

[8] OXIDES WHICH SHOW A METAL-TO-INSULATOR TRANSITION AT THE NEEL TEMPERATURE [J].

MORIN, FJ .

PHYSICAL REVIEW LETTERS, 1959, 3 (01) :34-36

[9] PREPARATION AND OPTICAL-PROPERTIES OF REACTIVELY EVAPORATED VO2 THIN-FILMS [J].

NYBERG, GA ;

BUHRMAN, RA .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1984, 2 (02) :301-302

[10] HIGH OPTICAL CONTRAST IN VO2 THIN-FILMS DUE TO IMPROVED STOICHIOMETRY [J].

NYBERG, GA ;

BUHRMAN, RA .

THIN SOLID FILMS, 1987, 147 (02) :111-116