COMPARISON OF MICROWAVE-INDUCED PLASMA SOURCES

被引：34

作者：

FORBES, KA ^{[1
]}

RESZKE, EE ^{[1
]}

UDEN, PC ^{[1
]}

BARNES, RM ^{[1
]}

机构：

[1] UNIV MASSACHUSETTS,LEDERLE GRAD RES CTR,DEPT CHEM,AMHERST,MA 01003

来源：

JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY | 1991年 / 6卷 / 01期

关键词：

MICROWAVE-INDUCED PLASMA; SOURCE DESIGN; OPERATING CONDITIONS;

D O I：

10.1039/ja9910600057

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Four microwave cavities/structures for spectrochemical analysis have been fabricated and tested: an enhanced Beenakker cavity, two modified surfatron-like structures and a strip line source. Each of these devices incorporated tuning improvements to enhance the microwave coupling efficiency. Preliminary tests indicated that stable discharges could be obtained in all four devices with a low power microwave generator. The operating stability range of power (0-120 W) and gas flow-rates (0-2.1 l min-1) and spectral emission properties for each device are compared with those of the conventional Beenakker cavity.

引用

页码：57 / 71

页数：15

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