HISTORICAL OVERVIEW OF SIMOX

被引:17
作者
IZUMI, K
机构
[1] NTT LSI Laboratories, Atsugi-shi, 243-01, 3-1, Morinosato Wakamiya
关键词
D O I
10.1016/0042-207X(91)90050-S
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The history of SIMOX technology is outlined from its origins to its current level of evaluation, centering especially on NTT's R&D activities. Mention is also made of the 100 mA-class high-current oxygen implanter, whose development offered an opportunity to explore SIMOX technology as one of the major means for SOI production. This marks a departure from the previous idea of pursuing the possibilities of SIMOX technology only at the laboratory level.
引用
收藏
页码:333 / 340
页数:8
相关论文
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