PHASE-STABILITY OF ZRO2-AL2O3 THIN-FILMS DEPOSITED BY MAGNETRON SPUTTERING

被引：22

作者：

QADRI, SB ^{[1
]}

GILMORE, CM ^{[1
]}

QUINN, C ^{[1
]}

SKELTON, EF ^{[1
]}

GOSSETT, CR ^{[1
]}

机构：

[1] GEORGE WASHINGTON UNIV,SCH ENGN & APPL SCI,WASHINGTON,DC 20052

来源：

PHYSICAL REVIEW B | 1989年 / 39卷 / 09期

关键词：

D O I：

10.1103/PhysRevB.39.6234

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：6234 / 6237

页数：4

共 10 条

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[2] STABILIZED ZIRCONIA ALUMINA THIN-FILMS [J].

GILMORE, CM ;

QUINN, C ;

SKELTON, EF ;

GOSSETT, CR ;

QADRI, SB .

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[3] STABILIZATION OF TETRAGONAL ZRO2 WITH AL2O3 IN REACTIVE MAGNETRON SPUTTERED THIN-FILMS [J].

GILMORE, CM ;

QUINN, C ;

QADRI, SB ;

GOSSETT, CR ;

SKELTON, EF .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04) :2085-2087

[4]

GOSSETT CR, 1980, NUCL INSTRUM METHODS, V168, P151, DOI 10.1016/0029-554X(80)91245-8

[5] TRANSFORMATION TOUGHENING .4. FABRICATION, FRACTURE-TOUGHNESS AND STRENGTH OF AL2O3-ZRO2 COMPOSITES [J].

LANGE, FF .

JOURNAL OF MATERIALS SCIENCE, 1982, 17 (01) :247-254

[6]

LANGE FF, 1982, J MATER SCI, V17, P225, DOI 10.1007/BF00809057

[7]

LEVIN EM, 1975, PHASE DIAGRAMS CERAM, P76

[8]

Ming L.C., 1985, SOLID STATE PHYS, P135

[9]

Rooksby H. P., 1951, XRAY IDENTIFICATION, P264

[10]

RUJKORAKARN R, 1986, J VAC SCI TECHNOL A, V4, P566

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