A NOVEL TECHNIQUE FOR INSITU MEASUREMENTS OF THIN-FILM PROPERTIES

被引：2

作者：

HIEBER, K

机构：

来源：

THIN SOLID FILMS | 1985年 / 130卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(85)90302-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：125 / 134

页数：10

共 13 条

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