ABSOLUTE CROSS-SECTIONS FOR THE ELECTRON-IMPACT DISSOCIATION OF CF4 AND CHF3 INTO THE CFX (X=1-3) NEUTRAL RADICALS

被引：46

作者：

SUGAI, H ^{[1
]}

TOYODA, H ^{[1
]}

NAKANO, T ^{[1
]}

GOTO, M ^{[1
]}

机构：

[1] SUZUKA COLL TECHNOL,DEPT ELECT ENGN,SUZUKA,MIE 51002,JAPAN

来源：

CONTRIBUTIONS TO PLASMA PHYSICS | 1995年 / 35卷 / 4-5期

关键词：

D O I：

10.1002/ctpp.2150350409

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

The electron-impact energy dependence of the dissociation cross sections of CF4 and CHF3 into the CFx (x = 1-3) free radicals was previously reported, in which the absolute values of the cross sections were tentatively estimated based on certain assumptions for the unknown ionization cross sections of the CF2 and CF radicals. These assumptions are no longer needed, since a complete set of absolute parent and dissociative ionization cross sections of CFx radicals has been reported recently by BECKER and co-workers. Based on these data, the absolute cross sections for the electron-impact neutral dissociation of CF4 and CHF3 into CF3, CF2 and CF from the threshold up to 200 - 300 eV have now been accurately calibrated. Adjustments to the previously reported absolute cross sections of up to a factor of 16 were necessary.

引用

页码：415 / 420

页数：6

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