LASER PHOTOCHEMICAL FABRICATION OF PHASE-CONTROLLED 160-NM PERIOD GRATINGS BY STIMULATED 2ND-ORDER SURFACE PLASMA-WAVE SCATTERING

被引：8

作者：

EHRLICH, DJ

BRUECK, SRJ

机构：

来源：

APPLIED PHYSICS LETTERS | 1985年 / 47卷 / 03期

关键词：

D O I：

10.1063/1.96222

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：216 / 218

页数：3

共 10 条

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[7] DEEP-UV SPATIAL-FREQUENCY DOUBLING BY COMBINING MULTILAYER MIRRORS WITH DIFFRACTION GRATINGS [J].

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[8] DEEP-ULTRAVIOLET SPATIAL-PERIOD DIVISION USING AN EXCIMER LASER [J].

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[9] PERIODIC SURFACE-STRUCTURES FROZEN INTO CO2 LASER-MELTED QUARTZ [J].

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[10] LASER-INDUCED PERIODIC SURFACE-STRUCTURE .3. FLUENCE REGIMES, THE ROLE OF FEEDBACK, AND DETAILS OF THE INDUCED TOPOGRAPHY IN GERMANIUM [J].

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PHYSICAL REVIEW B, 1984, 30 (04) :2001-2015

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