SHEATH COLLISION PROCESSES CONTROLLING THE ENERGY AND DIRECTIONALITY OF SURFACE BOMBARDMENT IN O-2 REACTIVE ION ETCHING

被引：78

作者：

JURGENSEN, CW

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 02期

关键词：

D O I：

10.1063/1.341947

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：590 / 597

页数：8

共 41 条

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