HIGH-QUALITY A-SI FILM PRODUCED BY HORIZONTAL PLASMA FURNACE

被引：6

作者：

KASHIMA, Y

NONOMURA, S

KIDA, H

FUKUMOTO, K

OKAMOTO, H

HAMAKAWA, Y

机构：

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1983年 / 59-6卷 / DEC期

关键词：

D O I：

10.1016/0022-3093(83)90281-8

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：755 / 758

页数：4

共 9 条

[1] OPTIMIZATION OF GD A-SI-H FILM PROPERTY FOR PHOTO-VOLTAIC DEVICE BY MEANS OF THE CROSS FIELD PLASMA DEPOSITION TECHNIQUE [J].

HOTTA, S ;

NISHIMOTO, N ;

TAWADA, Y ;

OKAMOTO, H ;

HAMAKAWA, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS, 1982, 21 (01) :289-295

[2]

Kuwano Y., 1982, Fourth E.C. Photovoltaic Solar Energy Conference. Proceedings of the International Conference, P704

[3] BACK SURFACE REFLECTED ELECTROABSORPTION AS A NEW CHARACTERIZATION METHOD OF INTERNAL POTENTIAL IN A-SI HOMOJUNCTION AND HETEROJUNCTION [J].

NONOMURA, S ;

FUKUMOTO, K ;

OKAMOTO, H ;

HAMAKAWA, Y .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1983, 59-6 (DEC) :1099-1102

[4] DETERMINATION OF THE BUILT-IN POTENTIAL IN A-SI SOLAR-CELLS BY MEANS OF ELECTRO-ABSORPTION METHOD [J].

NONOMURA, S ;

OKAMOTO, H ;

HAMAKAWA, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1982, 21 (08) :L464-L466

[5]

NONOMURA S, UNPUB SOLAR CELLS

[6] EFFECT OF DC ELECTRIC-FIELD ON THE BASIC PROPERTIES OF RF PLASMA DEPOSITED A-SI [J].

OKAMOTO, H ;

YAMAGUCHI, T ;

NITTA, Y ;

HAMAKAWA, Y .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1980, 35-6 (JAN-) :201-206

[7] DEVICE PHYSICS AND DESIGN OF A-SI ITO-P-I-N HETEROFACE SOLAR-CELLS [J].

OKAMOTO, H ;

NITTA, Y ;

YAMAGUCHI, T ;

HAMAKAWA, Y .

SOLAR ENERGY MATERIALS, 1980, 2 (03) :313-325

[8] MOBILITY-LIFETIME PRODUCT AND INTERFACE PROPERTY IN AMORPHOUS-SILICON SOLAR-CELLS [J].

OKAMOTO, H ;

KIDA, H ;

NONOMURA, S ;

FUKUMOTO, K ;

HAMAKAWA, Y .

JOURNAL OF APPLIED PHYSICS, 1983, 54 (06) :3236-3243

[9] CHARACTERIZATION OF MOBILITY-LIFETIME PRODUCTS AND INTERFACE PROPERTY IN AMORPHOUS-SILICON P-I-N JUNCTIONS [J].

OKAMOTO, H ;

KIDA, H ;

FUKUMOTO, K ;

NONOMURA, S ;

HAMAKAWA, Y .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1983, 59-6 (DEC) :1103-1106

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