AUGER-SPECTROSCOPY STUDIES OF OXIDATION OF AMORPHOUS AND CRYSTALLINE GERMANIUM

被引：17

作者：

HENRICH, VE ^{[1
]}

FAN, JCC ^{[1
]}

机构：

[1] MIT,LINCOLN LAB,LEXINGTON,MA 02173

来源：

JOURNAL OF APPLIED PHYSICS | 1975年 / 46卷 / 03期

关键词：

D O I：

10.1063/1.321726

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1206 / 1213

页数：8

共 18 条

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[2] STRUCTURAL, ELECTRICAL, AND OPTICAL PROPERTIES OF AMORPHOUS GERMANIUM FILMS [J].

CHOPRA, KL ;

BAHL, SK .

PHYSICAL REVIEW B, 1970, 1 (06) :2545-&

[3] ELECTRICAL AND OPTICAL PROPERTIES OF AMORPHOUS GERMANIUM [J].

CLARK, AH .

PHYSICAL REVIEW, 1967, 154 (03) :750-&

[4] STRUCTURAL AND OPTICAL-PROPERTIES OF AMORPHOUS-GERMANIUM - AMORPHOUS-GERMANIUM .3. OPTICAL-PROPERTIES [J].

CONNELL, GAN ;

TEMKIN, RJ ;

PAUL, W .

ADVANCES IN PHYSICS, 1973, 22 (05) :643-665

[5]

CONNELL GAN, PRIVATE COMMUNICATIO

[6] OPTICAL PROPERTIES OF AMORPHOUS GERMANIUM FILMS [J].

DONOVAN, TM ;

SPICER, WE ;

BENNETT, JM ;

ASHLEY, EJ .

PHYSICAL REVIEW B, 1970, 2 (02) :397-&

[7] HIGH-RESOLUTION ELECTRON MICROSCOPE OBSERVATION OF VOIDS IN AMORPHOUS GE [J].

DONOVAN, TM ;

HEINEMAN.K .

PHYSICAL REVIEW LETTERS, 1971, 27 (26) :1794-&

[8] OXIDATION STUDIES OF AMORPHOUS AND CRYSTALLINE GERMANIUM FILMS BY AUGER-SPECTROSCOPY [J].

FAN, JCC ;

HENRICH, VE .

APPLIED PHYSICS LETTERS, 1974, 25 (07) :401-403

[9]

FAN JCC, 1972, HP28 G MCKAY LAB REP, pCH3

[10]

GREEN M, 1956, SEMICONDUCTOR SURFAC, P349

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