SIGNAL FORMATION OF BACKSCATTERED ELECTRONS BY MICROINHOMOGENEITIES AND SURFACE RELIEF IN A SEM

被引：18

作者：

ARISTOV, VV

DREOMOVA, NN

FIRSOVA, AA

KAZMIRUK, VV

SAMSONOVICH, AV

USHAKOV, NG

ZAITSEV, SI

机构：

[1] Institute of Microelectronics Technology, USSR Academy of Sciences

来源：

SCANNING | 1991年 / 13卷 / 01期

关键词：

D O I：

10.1002/sca.4950130105

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

[No abstract available]

引用

页码：15 / 22

页数：8

共 14 条

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