INVESTIGATION OF SURFACE-TOPOGRAPHY USING THE BACKSCATTERED ELECTRON SIGNAL

被引：11

作者：

KACZMAREK, D

CZYZEWSKI, Z

HEJNA, J

RADZIMSKI, Z

机构：

来源：

SCANNING | 1987年 / 9卷 / 03期

关键词：

D O I：

10.1002/sca.4950090304

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：109 / 116

页数：8

共 16 条

[1]

AIZAKI N, 1979, JPN J APPL PHYS S18, V18, P319

[2] THE MEASUREMENT OF ATOMIC-NUMBER AND COMPOSITION IN AN SEM USING BACKSCATTERED DETECTORS [J].

BALL, MD ;

MCCARTNEY, DG .

JOURNAL OF MICROSCOPY-OXFORD, 1981, 124 (OCT) :57-68

[3]

BOTHE W, 1933, HDB PHYS, V22, P1

[4] RECONSTRUCTION OF TRUE SURFACE-TOPOGRAPHIES IN SCANNING ELECTRON-MICROSCOPES USING BACKSCATTERED ELECTRONS [J].

CARLSEN, IC .

SCANNING, 1985, 7 (04) :169-177

[5]

CZYZEWSKI Z, 1986, BEDO, V19, P251

[6] REGISTRATION MARK DETECTION FOR ELECTRON-BEAM LITHOGRAPHY-EL1 SYSTEM [J].

DAVIS, DE .

IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1980, 24 (05) :545-553

[7] SIMPLE THEORY CONCERNING THE REFLECTION OF ELECTRONS FROM SOLIDS [J].

EVERHART, TE .

JOURNAL OF APPLIED PHYSICS, 1960, 31 (08) :1483-1490

[8]

Lebiedzik J., 1979, Scanning, V2, P230, DOI 10.1002/sca.4950020405

[9] ALIGNMENT SIGNALS FROM SILICON TAPERED STEPS FOR ELECTRON-BEAM LITHOGRAPHY [J].

LIN, YC ;

NEUREUTHER, AR ;

ADESIDA, I .

JOURNAL OF APPLIED PHYSICS, 1982, 53 (02) :899-911

[10]

LIN YC, 1983, J ELECTROCHEM SOC, V130, P939, DOI 10.1149/1.2119862

← 1 2 →