PIEZOELECTRIC SENSOR FOR DETECTING FORCE GRADIENTS IN ATOMIC-FORCE MICROSCOPY

被引:20
作者
ITOH, T
SUGA, T
机构
[1] Research Center for Advanced Science and Technology (RCAST), The University of Tokyo
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1994年 / 33卷 / 1A期
关键词
PIEZOELECTRIC SENSOR; ATOMIC FORCE MICROSCOPY; NONCONTACT AFM; FORCE GRADIENT; PIEZOELECTRIC FILM; ZINC OXIDE; MICROBEAM;
D O I
10.1143/JJAP.33.334
中图分类号
O59 [应用物理学];
学科分类号
摘要
This paper presents a piezoelectric sensor for detecting force gradients in the noncontact atomic force microscope (AFM). To simplify the force gradient detecting system of the noncontact AFM, the direct sensing cantilever with a ZnO piezoelectric film has been developed. The signal related to the vibration amplitude of the cantilever end is measurable by detecting the charge induced by the piezoelectric effect. The gradient of the force between the tip of the vibrating cantilever driven by an external oscillator and the sample modifies the vibration amplitude of the lever, hence inducing a change of the piezoelectric charge signal. We have adapted the transfer matrix method for calculating the change of the piezoelectric charge due to the gradient of the force. The piezoelectric signal trace has been recorded as a function of sample displacement. We have converted the recorded data to force gradients using a transfer matrix.
引用
收藏
页码:334 / 340
页数:7
相关论文
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