STRUCTURAL STABILITY OF ZRO2-AL2O3 THIN-FILMS DEPOSITED BY MAGNETRON SPUTTERING

被引：28

作者：

QADRI, SB

GILMORE, CM

QUINN, C

SKELTON, EF

GOSSETT, CR

机构：

[1] USN,RES LAB,WASHINGTON,DC 20375

[2] GEORGE WASHINGTON UNIV,SCH ENGN & APPL SCI,WASHINGTON,DC 20022

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 03期

关键词：

D O I：

10.1116/1.576258

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1220 / 1224

页数：5

共 12 条

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QUINN, C ;

QADRI, SB ;

GOSSETT, CR ;

SKELTON, EF .

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[5]

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[6] TRANSFORMATION TOUGHENING .4. FABRICATION, FRACTURE-TOUGHNESS AND STRENGTH OF AL2O3-ZRO2 COMPOSITES [J].

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[8]

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[9]

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[10]

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