ORGANOMETALLIC VAPOR-PHASE EPITAXY OF GALLIUMNITRIDE USING GA(CH3)3.N(CH3)3-ADDUCT PYROLYSIS

被引：4

作者：

SEIFERT, W

FRANZHELD, R

BONISCH, F

BUTTER, E

机构：

来源：

CRYSTAL RESEARCH AND TECHNOLOGY | 1986年 / 21卷 / 01期

关键词：

D O I：

10.1002/crat.2170210104

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：9 / 14

页数：6

共 14 条

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