A THIN-FILM TRANSISTOR WITH A VERY THIN A-SI-H LAYER AND ITS APPLICATION FOR AN LC PANEL

被引:3
作者
TANAKA, H
SAKAI, T
SHIMBO, M
ARAI, S
YAMAZAKI, T
机构
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1986年 / 41卷 / 04期
关键词
D O I
10.1007/BF00616054
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:311 / 314
页数:4
相关论文
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[3]  
SAKAI T, 1985, 1985 P INT DISPL RES, P30
[4]   ULTRA-THIN FILM A-SI-H TRANSISTORS [J].
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[5]  
TANAKA H, 1985, 32ND JPN SOC APPL PH
[6]  
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