AMORPHOUS NBO FILMS PREPARED BY REACTIVE EVAPORATION

被引：2

作者：

DING, JR ^{[1
]}

ZHOU, X ^{[1
]}

BAI, JN ^{[1
]}

LIU, BX ^{[1
]}

机构：

[1] CCCAST,CTR CONDENSED MATTER & RADIAT PHYS,WORLD LAB,BEIJING,PEOPLES R CHINA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1990年 / 8卷 / 04期

关键词：

D O I：

10.1116/1.576550

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

收藏

页码：3349 / 3351

页数：3

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