HARDNESS DEMONSTRATION OF DIAMOND TIPS BY NANOMETER-SCALE CONTROLLED SCRATCHING ON METALLIC SURFACES

被引：4

作者：

CHU, X

MA, Z

LIU, N

CHANG, ZP

HU, TM

XUE, ZQ

PANG, SJ

机构：

[1] Beijing Laboratory of Vacuum Physics, Chinese Academy of Sciences, Beijing 100080

来源：

APPLIED PHYSICS LETTERS | 1993年 / 63卷 / 25期

关键词：

D O I：

10.1063/1.110115

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A new kind of diamond tip for the scanning tunneling microscope has been fabricated by a microwave plasma chemical vapor deposition method. The extreme hardness of the tips is demonstrated by doing nanometer-scale controlled direct scratching on various metallic surfaces using these tips. The results indicate the potential of such diamond tips for nanometer-scale mechanical polishing.

引用

收藏

页码：3446 / 3448

页数：3

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