IDENTIFICATION OF INTERMEDIATE RADICALS IN THE CH4 MICROWAVE PLASMA BY THE LI+ ATTACHMENT METHOD

被引：20

作者：

FUJII, T

SYOUJI, K

机构：

[1] National Institute for Environmental Studies, Tsukuba

来源：

PHYSICAL REVIEW A | 1992年 / 46卷 / 06期

关键词：

D O I：

10.1103/PhysRevA.46.3555

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We (i) describe the complete Li+-adduct mass spectrum of the CH4 microwave discharge plasma, obtained by ion attachment techniques, (ii) give evidence that many radicals are produced in the plasma, and (iii) present a preliminary spectral identification analysis. The identified species are CnH2n-1 (n = 2-13), CnH2n+1 (n = 2-13), C(n)H(n) (n = 2,4,5,6), and so on.

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页码：3555 / 3557

页数：3

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