STEXCU(TA) - SEED TEXTURING OF COPPER WITH TANTALUM SEED

被引:3
作者
KOWALSKI, ZW
机构
[1] Technical Univ of Wroclaw, Wroclaw, Pol, Technical Univ of Wroclaw, Wroclaw, Pol
关键词
MICROSCOPIC EXAMINATION - Scanning Electron Microscopy - SURFACES - Microscopic Examination;
D O I
10.1007/BF01739278
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The major intent of this study was to induce pyramid and/or cone surface texture and to identify different stages of the development of features on the surface according to primary and secondary effects. To obtain a pyramid (cone) texture, the STex technique has been applied. This means that a low sputtering yield seed material (tantalum plate in this case) was located in the proximity of the copper target and at about 0. 5 rad angle wth respect to the ion beam axis. The accelerating voltage used in the experiments was 800 v.
引用
收藏
页码:543 / 545
页数:3
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