IMPROVED RESOLUTION OF MULTILAYER X-RAY COATINGS - A DISTRIBUTED FABRY-PEROT ETALON

被引：4

作者：

BRUIJN, MP

VERHOEVEN, J

VANDERWIEL, MJ

BARTELS, WJ

机构：

[1] FOM,INST ATOM & MOLEC PHYS,1098 SJ AMSTERDAM,NETHERLANDS

[2] PHILIPS RES LABS,5600 JA EINDHOVEN,NETHERLANDS

来源：

OPTICAL ENGINEERING | 1987年 / 26卷 / 07期

关键词：

D O I：

10.1117/12.7974135

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：679 / 684

页数：6

共 17 条

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[7] AUTOMATIC ELECTRON-BEAM DEPOSITION OF MULTILAYER SOFT-X-RAY COATINGS WITH LATERALLY GRADED D-SPACING [J].

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[8] OPTIMIZATION OF MULTILAYER SOFT-X-RAY MIRRORS [J].

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[9]

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[10]

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