AN INVESTIGATION OF THE TWO-DIMENSIONAL SHAPE OF ION-IMPLANTED REGIONS

被引：9

作者：

ROITMAN, P ^{[1
]}

ALBERS, J ^{[1
]}

MYERS, DR ^{[1
]}

机构：

[1] SANDIA NATL LABS,ALBUQUERQUE,NM 87185

来源：

JOURNAL OF APPLIED PHYSICS | 1984年 / 55卷 / 12期

关键词：

D O I：

10.1063/1.333016

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4436 / 4443

页数：8

共 24 条

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