Metal-organic chemical vapor deposition of semiconducting III/VI In2Se3 thin films form the single-source precursor: In[SeC(SiMe(3))(3)](3)

被引：36

作者：

Cheon, JW ^{[1
]}

Arnold, J ^{[1
]}

Yu, KM ^{[1
]}

Bourret, ED ^{[1
]}

机构：

[1] UNIV CALIF BERKELEY,DEPT CHEM,BERKELEY,CA 94720

来源：

CHEMISTRY OF MATERIALS | 1995年 / 7卷 / 12期

关键词：

D O I：

10.1021/cm00060a014

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Thin films of In2Se3 have been prepared by metal-organic chemical vapor deposition (MOCVD) using volatile In[SeC(SiMe(3))(3)](3) as the precursor. The influence of growth parameters on the formation of crystalline phases and on the morphologies of In2Se3 films were examined by X-ray diffraction and scanning electron microscopy. The stoichiometry of the films was determined by Rutherford backscattering spectroscopy (RBS).

引用

页码：2273 / 2276

页数：4

共 37 条

[1] GROWTH OF II-VI THIN-FILMS FROM SINGLE-SOURCE PRECURSORS BASED ON STERICALLY ENCUMBERED SITEL LIGANDS
ARNOLD, J
WALKER, JM
YU, KM
BONASIA, PJ
SELIGSON, AL
BOURRET, ED
[J]. JOURNAL OF CRYSTAL GROWTH, 1992, 124 (1-4) : 647 - 653
[2] CUINSE2 THIN-FILMS PREPARED BY QUASI-FLASH EVAPORATION OF IN2SE3 AND CU2SE
ASHIDA, A
HACHIUMA, Y
YAMAMOTO, N
ITO, T
CHO, Y
[J]. JOURNAL OF MATERIALS SCIENCE LETTERS, 1994, 13 (16) : 1181 - 1184
[3] BANASZAK MM, 1990, J AM CHEM SOC, V112, P7989
[4] SYNTHESIS AND CHARACTERIZATION OF COPPER(I) AND SILVER(I) TELLUROLATES AND SELENOLATES - THE X-RAY CRYSTAL-STRUCTURES OF (CU[SEC(SIME3)3]PCY3)2 AND THE HOMOLEPTIC SILVER SELENOLATE AG4[SEC(SIME3)3]4
BONASIA, PJ
MITCHELL, GP
HOLLANDER, FJ
ARNOLD, J
[J]. INORGANIC CHEMISTRY, 1994, 33 (09) : 1797 - 1802
[5] ZINC, CADMIUM, AND MERCURY TELLUROLATES - HYDROCARBON SOLUBILITY AND LOW COORDINATION NUMBERS ENFORCED BY STERICALLY ENCUMBERED SILYLTELLUROLATE LIGANDS
BONASIA, PJ
ARNOLD, J
[J]. INORGANIC CHEMISTRY, 1992, 31 (12) : 2508 - 2514
[6] Organometallic Azides as Precursors for Aluminum Nitride Thin Films
Boyd, David C.
Haasch, Richard T.
Mantell, Daniel R.
Schulze, Roland K.
Evans, John F.
Gladfelter, Wayne L.
[J]. CHEMISTRY OF MATERIALS, 1989, 1 (01) : 119 - 124
[7] X-RAY, REFLECTION HIGH ELECTRON-ENERGY DIFFRACTION AND X-RAY PHOTOELECTRON-SPECTROSCOPY STUDIES OF INSE AND GAMMA-IN2SE3 THIN-FILMS GROWN BY MOLECULAR-BEAM DEPOSITION
BRAHIMOTSMANE, L
EMERY, JY
EDDRIEF, M
[J]. THIN SOLID FILMS, 1994, 237 (1-2) : 291 - 296
[8] SYNTHESIS AND CHARACTERIZATION OF DIVALENT LANTHANIDE SELENOLATES AND TELLUROLATES - X-RAY CRYSTAL-STRUCTURES OF YB[SESI(SIME3)3]2(TMEDA)2 AND (EU[TESI(SIME3)3]2(DMPE)2)2(MU-DMPE)
CARY, DR
ARNOLD, J
[J]. INORGANIC CHEMISTRY, 1994, 33 (09) : 1791 - 1796
[9] CHEON J, UNPUB
[10] SINGLE-SOURCE III/V PRECURSORS - A NEW APPROACH TO GALLIUM-ARSENIDE AND RELATED SEMICONDUCTORS
COWLEY, AH
JONES, RA
[J]. ANGEWANDTE CHEMIE-INTERNATIONAL EDITION IN ENGLISH, 1989, 28 (09): : 1208 - 1215

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