IMPACT IONIZATION AND DISTRIBUTION-FUNCTIONS IN SUBMICRON NMOSFET TECHNOLOGIES

被引:40
作者
BUDE, JD [1 ]
MASTRAPASQUA, M [1 ]
机构
[1] EINDHOVEN UNIV TECHNOL,5600 MB EINDHOVEN,NETHERLANDS
关键词
D O I
10.1109/55.464810
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The physics of impact ionization generated substrate current in 0.1 mu m nMOSFET's technologies is clarified by comparison of experiment and full-band Monte Carlo (MC) simulation for a wide range of biases. Quasiballistic transport is confirmed. It is shown for the first time that these devices allow extraction of ionization probabilities near threshold from substrate current measurements.
引用
收藏
页码:439 / 441
页数:3
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