FABRICATION OF QUANTUM DEVICES IN METALS AND SEMICONDUCTORS

被引：8

作者：

SCHMID, H

RISHTON, SA

KERN, DP

WASHBURN, S

WEBB, RA

KLEINSASSER, A

CHANG, THP

FOWLER, A

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 01期

关键词：

D O I：

10.1116/1.584027

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：122 / 126

页数：5

共 19 条

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[5]

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[7] EXPERIMENTAL PROOF OF MAGNETIC FLUX QUANTIZATION IN A SUPERCONDUCTING RING [J].

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[8]

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[9] PRACTICAL ASPECTS OF MICROFABRICATION IN THE 100 NM REGIME [J].

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[10]

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