PLASMA POLYMERIZATION INVESTIGATED BY THE SUBSTRATE-TEMPERATURE DEPENDENCE

被引：71

作者：

YASUDA, H ^{[1
]}

WANG, CR ^{[1
]}

机构：

[1] UNIV MISSOURI,CTR MAT RES,ROLLA,MO 65401

来源：

JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY | 1985年 / 23卷 / 01期

关键词：

D O I：

10.1002/pol.1985.170230110

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

引用

页码：87 / 106

页数：20

共 12 条

[1]

HEFFERNAN PJ, 1984, IND ENG CHEM PROD RE, V23, P155

[2]

HOLOVKA JM, 1974, SLA740181 SAND LABS

[3]

INAGAKI N, 1981, J APPL POLYM SCI, V26, P3557

[4] DEPOSITION OF THIN-FILMS BY DECOMPOSITION OF TETRA-ETHOXY SILANE IN A RADIO-FREQUENCY GLOW-DISCHARGE [J].

MUKHERJEE, SP ;

EVANS, PE .

THIN SOLID FILMS, 1972, 14 (01) :105-118

[5] DEPOSITION OF SILICA FILMS BY GLOW DISCHARGE TECNIQUE [J].

SECRIST, DR ;

MACKENZIE, JD .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1966, 113 (09) :914-+

[6] GLOW DISCHARGE POLYMERIZATION .1. RATES AND MECHANISMS OF POLYMER FORMATION [J].

WESTWOOD, AR .

EUROPEAN POLYMER JOURNAL, 1971, 7 (04) :363-&

[7] POLYMERIZATION OF ORGANOSILICONES IN MICROWAVE DISCHARGES .2. HEATED SUBSTRATES [J].

WROBEL, AM ;

KLEMBERG, JE ;

WERTHEIMER, MR ;

SCHREIBER, HP .

JOURNAL OF MACROMOLECULAR SCIENCE-CHEMISTRY, 1981, A15 (02) :197-213

[8] SOME ASPECTS OF PLASMA POLYMERIZATION INVESTIGATED BY PULSED RF DISCHARGE [J].

YASUDA, H ;

HSU, T .

JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY, 1977, 15 (01) :81-97

[9] CRITICAL EVALUATION OF CONDITIONS OF PLASMA POLYMERIZATION [J].

YASUDA, H ;

HIROTSU, T .

JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY, 1978, 16 (04) :743-759

[10] POLYMERIZATION OF STYRENE IN AN ELECTRODELESS GLOW DISCHARGE [J].

YASUDA, H ;

LAMAZE, CE .

JOURNAL OF APPLIED POLYMER SCIENCE, 1971, 15 (09) :2277-&

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