A NEW ALUMINUM PATTERN-FORMATION USING SUBSTITUTION-REACTION OF ALUMINUM FOR POLYSILICON AND ITS APPLICATION TO MOS DEVICE FABRICATION

被引：5

作者：

FUKUDA, Y

KOHDA, S

KITANO, Y

机构：

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1984年 / 31卷 / 06期

关键词：

D O I：

10.1109/T-ED.1984.21615

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

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页码：828 / 832

页数：5

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