GRAZING-INCIDENCE X-RAY-DIFFRACTION FROM SI WITH AN IMPLANTATION INDUCED AMORPHOUS SURFACE-LAYER

被引:3
作者
WALLNER, G
BURKEL, E
METZGER, H
PEISL, J
机构
[1] Ludwig-Maximilians-Univ, Munich, West Ger, Ludwig-Maximilians-Univ, Munich, West Ger
来源
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1988年 / 108卷 / 01期
关键词
D O I
10.1002/pssa.2211080110
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:129 / 133
页数:5
相关论文
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