SURFACE MODIFICATION OF KAPTON FILM BY PLASMA TREATMENTS

被引:114
作者
INAGAKI, N
TASAKA, S
HIBI, K
机构
[1] Laboratory of Polymer Chemistry, Shizuoka University, Hamamatsu, 432, 3‐5‐1, Johoku
关键词
PLASMA TREATMENT; KAPTON; SURFACE MODIFICATION; HYDROPHILIC PROPERTIES; CONTACT ANGLE; IR SPECTRA; XPS SPECTRA;
D O I
10.1002/pola.1992.080300722
中图分类号
O63 [高分子化学(高聚物)];
学科分类号
070305 ; 080501 ; 081704 ;
摘要
Kapton films were treated with seven plasmas: Ar-, N2-, O2-, CO-, CO2-, NO-, and NO2-plasmas. Surface properties and chemical composition of the plasma-treated Kapton films were investigated from the contact angle measurement, and the IR and XPS spectra. The plasmas, especially NO- and NO2-plasma, made the Kapton film surface hydrophilic. The XPS and IR spectra showed that the plasma led to the modification of the imide groups in the Kapton film to secondary amide and carboxylate groups.
引用
收藏
页码:1425 / 1431
页数:7
相关论文
共 30 条
[1]  
Bellamy L.J., 1966, INFRARED SPECTRA COM, V3rd Edn
[2]  
BRISCOE BJ, 1991, J ADHES SCI TECHNOL, V5, P23, DOI 10.1163/156856191X00800
[3]   ADHESION OF POLYIMIDES TO METAL AND CERAMIC SURFACES - AN OVERVIEW [J].
BUCHWALTER, LP .
JOURNAL OF ADHESION SCIENCE AND TECHNOLOGY, 1990, 4 (09) :697-721
[4]   INTERFACIAL REACTIONS AT COPPER SURFACES COATED WITH POLYIMIDE FILMS PREPARED FROM POLY(AMIDE-ACID) PRECURSORS [J].
BURRELL, MC ;
CODELLA, PJ ;
FONTANA, JA ;
CHERA, JJ ;
MCCONNELL, MD .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (01) :55-58
[5]  
CHOU NJ, 1984, J VAC SCI TECHNOL A, V2, P751, DOI 10.1116/1.572564
[6]   AN XPS AND TEM STUDY OF INTRINSIC ADHESION BETWEEN POLYIMIDE AND CR FILMS [J].
CHOU, NJ ;
DONG, DW ;
KIM, J ;
LIU, AC .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (10) :2335-2340
[7]  
DOTE T, 1964, JPN J APPL PHYS, V7, P964
[8]   ADHESION AND DEFORMATION OF METAL POLYIMIDE LAYERED STRUCTURES [J].
FAUPEL, F ;
YANG, CH ;
CHEN, ST ;
HO, PS .
JOURNAL OF APPLIED PHYSICS, 1989, 65 (05) :1911-1917
[9]  
Fowkes F. M., 1987, J ADHES SCI TECHNOL, V1, P7, DOI [10.1163/156856187X00049, DOI 10.1163/156856187X00049]
[10]   ADHESION ENHANCEMENT OF NI FILMS ON POLYIMIDE USING ION PROCESSING .2. KR-84+ IMPLANTATION [J].
GALUSKA, AA .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1990, 8 (03) :482-487