ADHESION ENHANCEMENT OF NI FILMS ON POLYIMIDE USING ION PROCESSING .2. KR-84+ IMPLANTATION

被引：15

作者：

GALUSKA, AA

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1990年 / 8卷 / 03期

关键词：

D O I：

10.1116/1.585048

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：482 / 487

页数：6

共 18 条

[1] ALUMINUM POLYIMIDE INTERFACE FORMATION - AN X-RAY PHOTOELECTRON-SPECTROSCOPY STUDY OF SELECTIVE CHEMICAL BONDING
ATANASOSKA, L
ANDERSON, SG
MEYER, HM
LIN, Z
WEAVER, JH
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (06): : 3325 - 3333
[2] ION-BOMBARDMENT OF POLYIMIDE FILMS
BACHMAN, BJ
VASILE, MJ
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (04): : 2709 - 2716
[3] METAL-POLYMER INTERFACES - ADHESION AND X-RAY PHOTOEMISSION-STUDIES
BURKSTRAND, JM
[J]. JOURNAL OF APPLIED PHYSICS, 1981, 52 (07) : 4795 - 4800
[4] THE RELATIONSHIP BETWEEN HARDNESS AND SCRATCH ADHESION
BURNETT, PJ
RICKERBY, DS
[J]. THIN SOLID FILMS, 1987, 154 (1-2) : 403 - 416
[5] Chu W.-K., 1978, BACKSCATTERING SPECT
[6] ION MIXING OF AL2O3 AND AL FILMS ON SIO2
GALUSKA, AA
UHT, JC
ADAMS, PM
COGGI, JM
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (02): : 185 - 192
[7] ION-ENHANCED ADHESION OF NI FILMS ON GLASSY-CARBON .2. KR-84+ IMPLANTATION
GALUSKA, AA
[J]. APPLIED SURFACE SCIENCE, 1989, 40 (1-2) : 33 - 40
[8] ION-ENHANCED ADHESION OF NI FILMS ON GLASSY-CARBON .1. SI-28+ IMPLANTATION
GALUSKA, AA
[J]. APPLIED SURFACE SCIENCE, 1989, 40 (1-2) : 19 - 31
[9] REACTIVE AND NONREACTIVE ION MIXING OF NI FILMS ON CARBON SUBSTRATES
GALUSKA, AA
UHT, JC
ADAMS, PM
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (01): : 99 - 109
[10] REACTIVE AND NONREACTIVE ION MIXING OF TI FILMS ON CARBON SUBSTRATES
GALUSKA, AA
UHT, JC
MARQUEZ, N
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (01): : 110 - 122

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