ION-ENHANCED ADHESION OF NI FILMS ON GLASSY-CARBON .1. SI-28+ IMPLANTATION

被引：28

作者：

GALUSKA, AA

机构：

[1] Sandia Natl Lab, United States

来源：

APPLIED SURFACE SCIENCE | 1989年 / 40卷 / 1-2期

关键词：

29;

D O I：

10.1016/0169-4332(89)90155-4

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

收藏

页码：19 / 31

页数：13

相关论文

共 29 条

[1] EVALUATION OF ADHESION STRENGTH OF THIN HARD COATINGS
ARAI, T
FUJITA, H
WATANABE, M
[J]. THIN SOLID FILMS, 1987, 154 (1-2) : 387 - 401
[2] SEMICONDUCTOR POLYIMIDE INTERFACE FORMATION - AN X-RAY PHOTOELECTRON-SPECTROSCOPY STUDY OF GERMANIUM CHEMICAL BONDING
ATANASOSKA, L
MEYER, HM
ANDERSON, SG
WEAVER, JH
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (04): : 2175 - 2181
[3] ALUMINUM POLYIMIDE INTERFACE FORMATION - AN X-RAY PHOTOELECTRON-SPECTROSCOPY STUDY OF SELECTIVE CHEMICAL BONDING
ATANASOSKA, L
ANDERSON, SG
MEYER, HM
LIN, Z
WEAVER, JH
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (06): : 3325 - 3333
[4] ION-BEAM BONDING OF THIN-FILMS
BAGLIN, JEE
CLARK, GJ
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) : 881 - 885
[5] METAL-POLYMER INTERFACES - ADHESION AND X-RAY PHOTOEMISSION-STUDIES
BURKSTRAND, JM
[J]. JOURNAL OF APPLIED PHYSICS, 1981, 52 (07) : 4795 - 4800
[6] THE RELATIONSHIP BETWEEN HARDNESS AND SCRATCH ADHESION
BURNETT, PJ
RICKERBY, DS
[J]. THIN SOLID FILMS, 1987, 154 (1-2) : 403 - 416
[7] CRANMER DC, 1986, ADV CERAM MATER, V1, P247
[8] DAVIS LE, 1976, HDB AUGER ELECTRON S
[9] DYE RR, 1980, J CHEM PHYS, V73, P4867
[10] CHARACTERIZATION OF AMORPHOUS SIOX LAYERS WITH ESCA
FINSTER, J
SCHULZE, D
MEISEL, A
[J]. SURFACE SCIENCE, 1985, 162 (1-3) : 671 - 679