ION-ENHANCED ADHESION OF NI FILMS ON GLASSY-CARBON .1. SI-28+ IMPLANTATION

被引：28

作者：

GALUSKA, AA

机构：

[1] Sandia Natl Lab, United States

来源：

关键词：

29;

D O I：

10.1016/0169-4332(89)90155-4

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：19 / 31

页数：13

共 29 条

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