PREPARATION OF SMCO AMORPHOUS MAGNETIC-FILM WITH PERPENDICULAR MAGNETIZATION

被引：11

作者：

LEE, ZY ^{[1
]}

NUMATA, T ^{[1
]}

INOKUCHI, S ^{[1
]}

SAKURAI, Y ^{[1
]}

机构：

[1] OSAKA UNIV,FAC ENGN SCI,TOYONAKA,OSAKA 560,JAPAN

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1984年 / 20卷 / 05期

关键词：

MAGNETIC MATERIALS - Thin Films - MAGNETIZATION - SPUTTERING;

D O I：

10.1109/TMAG.1984.1063196

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Sm//xCo//1//0//0// minus //x (20 less than equivalent to x less than equivalent to 30) films deposited on glass substrate and Sm//3//7//. //8Co//6//2//. //2 films deposited on silicon substrate with perpendicular magnetization have been prepared by a magnetron rf sputtering. The influence of sputtering conditions, i. e. bias voltage; substrate temperature; composition and perpendicular magnetic field on perpendicular anisotropy are reported in detail.

引用

页码：1335 / 1337

页数：3

共 7 条

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[3] ROLE OF DC BIAS IN RF SPUTTERING PROCESS OF AMORPHOUS GD-CO FILMS
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[4] KULLMAN U, 1982, 3RD JOINT INT MMM C
[5] SM-CO AMORPHOUS FILM WITH PERPENDICULAR ANISOTROPY
LEE, ZY
NUMATA, T
SAKURAI, Y
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1983, 22 (09): : L600 - L601
[6] LEE ZY, 1983, J MAGN SOC JPN, V7, P47
[7] MAGNETIC-PROPERTIES OF SM-CO THIN-FILMS PREPARED BY OBLIQUE-INCIDENCE
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[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1982, 21 (10): : L619 - L620

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