SNMS SNART - FOCUSING ON INSULATOR ANALYSIS

被引：4

作者：

HAMAGAKI, M ^{[1
]}

KATO, S ^{[1
]}

HARA, T ^{[1
]}

HAYASHI, S ^{[1
]}

机构：

[1] NIPPON STEEL CORP LTD,KAWASAKI 211,JAPAN

来源：

VACUUM | 1990年 / 41卷 / 7-9期

关键词：

D O I：

10.1016/0042-207X(90)94069-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Measurements of the electron energy distributions and the plasma parameters were carried out by a Langmuir probe in the electron beam excited (EBE) plasma which was utilized for SNMS as SNART (Sputtered Neutral Analysis-Riken Type). It was clarified that the EBE plasma has a broad high energy component of the electron beam. It was also found that there is a potential difference of 60-110 V between the floating potential of the insulator target and the space potential, which is sufficient for sputtering. The insulator analysis by SNART could be obtained very quickly due to the high ion current density and the existence of high energy electron component in the EBE plasma.

引用

页码：1730 / 1732

页数：3

共 7 条

[1] PROBE DIAGNOSTICS IN NEGATIVE-ION CONTAINING PLASMA [J].