共 29 条
- [1] ELECTRON-BEAM FABRICATION OF 80-A METAL STRUCTURES [J]. APPLIED PHYSICS LETTERS, 1976, 29 (09) : 596 - 598
- [2] ION-BEAM LITHOGRAPHY [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1981, 191 (1-3): : 157 - 168
- [3] CALCAGNO L, 1984, APPL PHYS LETT, V44, P8
- [4] DEMAYO P, 1973, MOL PHOTOCHEM, V5, P339
- [5] DEMAYO P, 1973, J AM CHEM SOC, V95, P3942
- [6] DREYFUS RW, 1986, RAD EFFECTS, V99
- [7] ESKILDSEN SS, 1985, APPL PHYS LETT, V46, P11
- [8] FLEISCHER RL, 1975, NUCLEAR TRACKS SOLID
- [9] GARRISON BJ, 1985, J APPL PHYS, V57, P8
- [10] GEIS MW, 1985, J VAC SCI TECHNOL B, V3, P1