A THEORETICAL PERFORMANCE COMPARISON OF 6 ELECTROSTATIC E-BEAM DEFLECTORS

被引：12

作者：

SCHAEFER, CH

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1986年 / 4卷 / 05期

关键词：

D O I：

10.1116/1.583488

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1237 / 1242

页数：6

共 12 条

[1] CORRECTION OF THE DISTORTED ELECTRON-BEAM SPOT DEFLECTED BY ELECTROSTATIC CROSSED DEFLECTION FIELDS
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KANAYA, K
[J]. JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1981, 14 (02): : 183 - 193
[2] CHU HC, 1982, OPTIK, V61, P121
[3] IN-LENS DEFLECTION SYSTEM WITH NONEQUISECTORED-TYPE MULTIPOLE ELECTROSTATIC DEFLECTORS
GOTO, E
SOMA, T
IDESAWA, M
SASAKI, T
GOTO, T
KONNO, S
SOMEYA, T
TANAKA, K
MIYAUCHI, S
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (04): : 1289 - 1292
[4] Hutter R. G. E., 1974, ADV IMAGE PICK UP DI, V1, P163
[5] Jaswon M.A., 1977, INTEGRAL EQUATION ME
[6] ISOPARAMETRIC, FINITE-ELEMENT, VARIATIONAL SOLUTION OF INTEGRAL-EQUATIONS FOR 3-DIMENSIONAL FIELDS
JENG, G
WEXLER, A
[J]. INTERNATIONAL JOURNAL FOR NUMERICAL METHODS IN ENGINEERING, 1977, 11 (09) : 1455 - 1471
[7] A LARGE AREA DEFLECTION SYSTEM WITH VERY LOW ABERRATION
KUO, HP
GROVES, TR
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (04): : 1316 - 1321
[8] VARIATIONAL SOLUTION OF INTEGRAL-EQUATIONS
MCDONALD, BH
FRIEDMAN, M
WEXLER, A
[J]. IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1974, TT22 (03) : 237 - 248
[9] MUNRO E, 1982, OPTIK, V61, P1
[10] RITZ EF, 1984, ELECTRON OPT SYST, V3, P97