PREPARATION AND PROPERTIES OF A-SI FILMS DEPOSITED AT A HIGH DEPOSITION RATE UNDER A MAGNETIC-FIELD

被引：12

作者：

OHNISHI, M ^{[1
]}

NISHIWAKI, H ^{[1
]}

UCHIHASHI, K ^{[1
]}

YOSHIDA, K ^{[1
]}

TANAKA, M ^{[1
]}

NINOMIYA, K ^{[1
]}

NISHIKUNI, M ^{[1
]}

NAKAMURA, N ^{[1
]}

TSUDA, S ^{[1
]}

NAKANO, S ^{[1
]}

YAZAKI, T ^{[1
]}

KUWANO, Y ^{[1
]}

机构：

[1] SANYO ELECT CO LTD,RES CTR,HIRAKATA,OSAKA 573,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1988年 / 27卷 / 01期

关键词：

D O I：

10.1143/JJAP.27.40

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：40 / 46

页数：7

共 9 条

[1] HIGH-RATE DEPOSITION OF AMORPHOUS HYDROGENATED SILICON FROM A SIH4 PLASMA
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[2] ITOH H, 1984, INT PVSEC 1 KOBE, P119
[3] PREPARATION AND PROPERTIES OF AMORPHOUS-SILICON PRODUCED BY A CONSECUTIVE, SEPARATED REACTION CHAMBER METHOD
OHNISHI, M
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[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1983, 59-6 (DEC) : 1107 - 1110
[4] OPTICAL AND ELECTRICAL-PROPERTIES OF HYDROGENATED AMORPHOUS-SILICON PREPARED BY GLOW-DISCHARGE DECOMPOSITION OF DISILANE
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[J]. SOLAR ENERGY MATERIALS, 1984, 10 (02): : 121 - 138
[5] GLOW-DISCHARGE PREPARATION OF AMORPHOUS HYDROGENATED SILICON FROM HIGHER SILANES
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[J]. APPLIED PHYSICS LETTERS, 1980, 37 (08) : 725 - 727
[6] SHIMADA T, 1984, INT PVSEC 1 KOBE, P445
[7] EFFECT OF B2H6 PROFILE ON THE PERFORMANCE OF A-SI-H P-I-N SOLAR-CELLS
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[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1983, 59-6 (DEC) : 1155 - 1158
[8] A NEW ANALYTICAL METHOD OF AMORPHOUS-SILICON SOLAR-CELLS
TAKAHAMA, T
ISOMURA, M
TSUDA, S
TARUI, H
HISHIKAWA, Y
NAKAMURA, N
NAKASHIMA, Y
MATSUOKA, T
NISHIWAKI, H
OHNISHI, M
NAKANO, S
KUWANO, Y
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1986, 25 (10): : 1538 - 1541
[9] AMORPHOUS-SILICON HYDROGEN ALLOYS PRODUCED UNDER MAGNETIC-FIELD
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HIROSE, M
OSAKA, Y
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1980, 35-6 (JAN-) : 189 - 194

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