APPLICATION OF ATOMIC-FORCE MICROSCOPY FOR MICROINDENTATION TESTING

被引：27

作者：

PETZOLD, M

LANDGRAF, J

FUTING, M

OLAF, JM

机构：

[1] Fraunhofer-Institut für Werkstoffmechanik, D 06120 Halle

来源：

THIN SOLID FILMS | 1995年 / 264卷 / 02期

关键词：

ALUMINUM; ATOMIC FORCE MICROSCOPY; GLASS; HARDNESS;

D O I：

10.1016/0040-6090(95)05855-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Examples for applications of an atomic force microscope (AFM) in indentation testing are discussed. Scanning of the diamond indenter tips provided information on shape and wear, which could be used to consider the influence of tip blunting on hardness results during depth-recording testing. In comparison, hardness was also determined from AFM images of the residual indentations which reduced methodical problems inherent in depth recording. In this case hardness values of aluminium bond pads could be correlated with the surface structure revealed by the AFM simultaneously.

引用

页码：153 / 158

页数：6

共 11 条

[1] Dengel D., 1989, Materialpruefung, V31, P227
[2] A method for interpreting the data from depth-sensing indentation instruments
Doerner, M. F.
Nix, W. D.
[J]. JOURNAL OF MATERIALS RESEARCH, 1986, 1 (04) : 601 - 609
[3] GRAU P, 1993, GLASTECH BER-GLASS, V66, P313
[4] KATZER D, SMT 94 HYBRID 94 NUR, P2
[5] KOCH T, IWM T0594 FRAUNH I W
[6] OLAF JM, UNPUB
[7] OLAF JM, 1993, HARTEREI TECHN MITT, V48, P5
[8] AN IMPROVED TECHNIQUE FOR DETERMINING HARDNESS AND ELASTIC-MODULUS USING LOAD AND DISPLACEMENT SENSING INDENTATION EXPERIMENTS
OLIVER, WC
PHARR, GM
[J]. JOURNAL OF MATERIALS RESEARCH, 1992, 7 (06) : 1564 - 1583
[9] ULTRATHIN-FILM HARDNESS INVESTIGATIONS BY A MODIFIED ATOMIC-FORCE MICROSCOPE
PERSCH, G
BORN, C
UTESCH, B
[J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1994, 59 (01): : 29 - 32
[10] PETZOLD M, UNPUB

← 1 2 →