THEORETICAL ASSESSMENTS OF MAJOR PHYSICAL PROCESSES INVOLVED IN THE DEPTH RESOLUTION IN SPUTTER PROFILING

被引：52

作者：

CARTER, G

GRASMARTI, A

NOBES, MJ

机构：

来源：

RADIATION EFFECTS AND DEFECTS IN SOLIDS | 1982年 / 62卷 / 3-4期

关键词：

D O I：

10.1080/00337578208222785

中图分类号：

TL [原子能技术]; O571 [原子核物理学];

学科分类号：

0827 ; 082701 ;

摘要：

引用

页码：119 / 152

页数：34

共 82 条

[71] DEPTH DEPENDENCE OF ATOMIC MIXING BY ION-BEAMS [J].

TSAUR, BY ;

MATTESON, S ;

CHAPMAN, G ;

LIAU, ZL ;

NICOLET, MA .

APPLIED PHYSICS LETTERS, 1979, 35 (10) :825-828

[72] ION-BOMBARDMENT INDUCED PREFERENTIAL ORIENTATION IN POLYCRYSTALLINE CU TARGETS [J].

VANWYK, GN ;

SMITH, HJ .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1978, 38 (3-4) :245-247

[73] INFLUENCE OF PREFERENTIAL ENHANCED DIFFUSION ON COMPOSITION CHANGES IN SPUTTERED BINARY SOLIDS [J].

WEBB, R ;

CARTER, G ;

COLLINS, R .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1978, 39 (3-4) :129-139

[74] INFLUENCE OF THE ANGLE OF INCIDENCE ON SPUTTERING YIELDS [J].

WEHNER, G .

JOURNAL OF APPLIED PHYSICS, 1959, 30 (11) :1762-1765

[75]

WERNER HW, 1973, VACUUM, V22, P613

[76]

Whitham GB., 1974, PURE APPL MATH

[77]

WHITTON JL, 1980, 1980 P S SPUTT PERCH, P552

[78]

Wilson I. H., 1973, Radiation Effects, V18, P95, DOI 10.1080/00337577308234723

[79] ON THE NET RECOIL DENSITY [J].

WINTERBON, KB .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1980, 46 (3-4) :181-188

[80]

WINTERBON KB, 1970, KGL DANSKE VID SELS, V37

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