THEORETICAL ASSESSMENTS OF MAJOR PHYSICAL PROCESSES INVOLVED IN THE DEPTH RESOLUTION IN SPUTTER PROFILING

被引：52

作者：

CARTER, G

GRASMARTI, A

NOBES, MJ

机构：

来源：

RADIATION EFFECTS AND DEFECTS IN SOLIDS | 1982年 / 62卷 / 3-4期

关键词：

D O I：

10.1080/00337578208222785

中图分类号：

TL [原子能技术]; O571 [原子核物理学];

学科分类号：

0827 ; 082701 ;

摘要：

引用

页码：119 / 152

页数：34

共 82 条

[41]

Makh S. S., 1980, Surface and Interface Analysis, V2, P115, DOI 10.1002/sia.740020307

[42] INFLUENCE OF ION-BOMBARDMENT ON DEPTH RESOLUTION IN AUGER-ELECTRON SPECTROSCOPY ANALYSIS OF THIN GOLD-FILMS ON NICKEL [J].

MATHIEU, HJ ;

MCCLURE, DE ;

LANDOLT, D .

THIN SOLID FILMS, 1976, 38 (03) :281-294

[43] A SEMI-EMPIRICAL FORMULA FOR THE ENERGY-DEPENDENCE OF THE SPUTTERING YIELD [J].

MATSUNAMI, N ;

YAMAMURA, Y ;

ITIKAWA, Y ;

ITOH, N ;

KAZUMATA, Y ;

MIYAGAWA, S ;

MORITA, K ;

SHIMIZU, R .

RADIATION EFFECTS LETTERS, 1980, 57 (1-2) :15-21

[44] ION-BEAM MIXING IN AMORPHOUS-SILICON .2. THEORETICAL INTERPRETATION [J].

MATTESON, S ;

PAINE, BM ;

NICOLET, MA .

NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR) :53-61

[45] ION BEAM MIXING IN AMORPHOUS SILICON - 1. EXPERIMENTAL INVESTIGATION. [J].

Matteson, S. ;

Paine, B.M. ;

Grimaldi, M.G. ;

Mezey, G. ;

Nicolet, M.A. .

Nuclear instruments and methods, 1981, 182 /183 (pt 1) :43-51

[46] EQUILIBRIUM TOPOGRAPHY OF SPUTTERED AMORPHOUS SOLIDS [J].

NOBES, MJ ;

COLLIGON, JS ;

CARTER, G .

JOURNAL OF MATERIALS SCIENCE, 1969, 4 (08) :730-&

[47] THE DEVELOPMENT OF SURFACE-MORPHOLOGY DURING SPUTTERING WITH SPATIALLY NONUNIFORM ION-BEAMS [J].

NOBES, MJ ;

WEBB, RP ;

CARTER, G ;

WHITTON, JL .

RADIATION EFFECTS LETTERS, 1980, 50 (3-6) :133-138

[48]

NOBES MJ, 1980, NUCL INSTRUM METHODS, V170, P363

[49]

PEONFERNANDEZ J, UNPUB

[50]

ROBINSON MT, 1981, TOP APPL PHYS, V47, pCH3

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