COMPARISON OF DEVICE PERFORMANCE OF HIGHLY STRAINED GA1-XINXAS/AL0.48IN0.52AS (0.53-LESS-THAN-OR-EQUAL-TO-X-LESS-THAN-OR-EQUAL-TO-0.90) MODFETS

被引:23
作者
CHOUGH, KB
CHANG, TY
FEUER, MD
LALEVIC, B
机构
[1] AT&T BELL LABS,HOLMDEL,NJ 07733
[2] RUTGERS STATE UNIV,DEPT ELECT ENGN,PISCATAWAY,NJ 08854
[3] RUTGERS STATE UNIV,DEPT ELECT & COMP ENGN,PISCATAWAY,NJ 08854
关键词
FIELD-EFFECT TRANSISTORS; TRANSISTORS; SEMICONDUCTOR DEVICES AND MATERIALS;
D O I
10.1049/el:19920204
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A series of 1.3-mu-m gate length Ga1-xIn(x)As/Al0.4KIn0.52As MODFETs covering a wide range of x values in the channel (0.53 less-than-or-equal-to x less-than-or-equal-to 0.90 with strain compensation for x greater-than-or-equal-to 0.77) has been successfully fabricated and compared. Although the maximum values of transconductance (1010 mS/mm), saturated drain current density (920 mA/mm), and room-temperature mobility are obtained with x = 0.85, lower x values of 0.77-0.80 are found to offer the highest 77K mobility and the best cutoff-frequency-gate-length product.
引用
收藏
页码:329 / 330
页数:2
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