APPLICATION OF REAL-TIME INFRARED-SPECTROSCOPY TO MONITORING THE KINETICS OF CHEMICALLY AMPLIFIED RESISTS

被引：7

作者：

HOWES, GR

GAMSKY, CJ

TAYLOR, JW

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 06期

关键词：

D O I：

10.1116/1.587565

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：3868 / 3873

页数：6

共 11 条

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