STRESS IN THICK DIAMOND FILMS DEPOSITED ON SILICON

被引：27

作者：

VANDAMME, NS ^{[1
]}

NAGLE, DC ^{[1
]}

WINZER, SR ^{[1
]}

机构：

[1] MARTIN MARIETTA CORP LABS,BALTIMORE,MD 21227

来源：

APPLIED PHYSICS LETTERS | 1991年 / 58卷 / 25期

关键词：

D O I：

10.1063/1.104722

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

20-mu-m-thick diamond films deposited on Si single-crystal substrates by microwave plasma-enhanced chemical vapor deposition showed significant curvature. The internal stress distribution was estimated using the model of an elastic bimetallic strip. The results indicate that the films are under a mean tensile stress of 1.1 GPa, and are discussed using information from x-ray diffraction and Raman spectra.

引用

收藏

页码：2919 / 2920

页数：2

相关论文

共 12 条

[1] LOW-PRESSURE, METASTABLE GROWTH OF DIAMOND AND DIAMONDLIKE PHASES [J].

ANGUS, JC ;

HAYMAN, CC .

SCIENCE, 1988, 241 (4868) :913-921

[2] INTERNAL-STRESS AND ELASTICITY OF SYNTHETIC DIAMOND FILMS [J].

BERRY, BS ;

PRITCHET, WC ;

CUOMO, JJ ;

GUARNIERI, CR ;

WHITEHAIR, SJ .

APPLIED PHYSICS LETTERS, 1990, 57 (03) :302-303

[3] RAMAN-SPECTRA OF DIAMOND AT HIGH-PRESSURES [J].

BOPPART, H ;

VANSTRAATEN, J ;

SILVERA, IF .

PHYSICAL REVIEW B, 1985, 32 (02) :1423-1425

[4] SURFACE CHARGE AND STRESS IN SI-SIO2 SYSTEM [J].

BROTHERTON, SD ;

READ, TG ;

LAMB, DR ;

WILLOUGHBY, AF .

SOLID-STATE ELECTRONICS, 1973, 16 (12) :1367-1375

[5] STRESS-INDUCED SPECTRAL CHANGES IN RAMAN-SPECTRA OF N-GAAS ENCAPSULATED WITH SI3N4 FILMS [J].

HASHIMOTO, A ;

KAMIJOH, T ;

TAKANO, H ;

SAKUTA, M .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1987, 134 (01) :153-156

[6] MEASUREMENT OF STRAINS AT SI-SIO2 INTERFACE [J].

JACCODINE, RJ ;

SCHLEGEL, WA .

JOURNAL OF APPLIED PHYSICS, 1966, 37 (06) :2429-+

[7] DIAMOND SYNTHESIS FROM GAS-PHASE IN MICROWAVE PLASMA [J].

KAMO, M ;

SATO, Y ;

MATSUMOTO, S ;

SETAKA, N .

JOURNAL OF CRYSTAL GROWTH, 1983, 62 (03) :642-644

[8] PHOTO-ELASTIC WAVEGUIDES AND THEIR EFFECT ON STRIPE-GEOMETRY GAAS-GA1-XALXAS LASERS [J].

KIRKBY, PA ;

SELWAY, PR ;

WESTBROOK, LD .

JOURNAL OF APPLIED PHYSICS, 1979, 50 (07) :4567-4579

[9] CHARACTERIZATION OF DIAMOND FILMS BY RAMAN-SPECTROSCOPY [J].

KNIGHT, DS ;

WHITE, WB .

JOURNAL OF MATERIALS RESEARCH, 1989, 4 (02) :385-393

[10]

Simmons G., 1971, SINGLE CRYSTAL ELAST