METAL-INDUCED CRYSTALLIZATION OF HYDROGENATED AMORPHOUS SI FILMS

被引：26

作者：

TSAI, CC

NEMANICH, RJ

THOMPSON, MJ

STAFFORD, BL

机构：

来源：

PHYSICA B & C | 1983年 / 117卷 / MAR期

关键词：

D O I：

10.1016/0378-4363(83)90705-2

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

收藏

页码：953 / 956

页数：4

相关论文

共 6 条

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[J]. APPLIED PHYSICS LETTERS, 1981, 39 (03) : 274 - 276
[5] STRUCTURAL STUDIES OF AMORPHOUS SEMICONDUCTING THIN-FILMS USING INTERFERENCE ENHANCED RAMAN-SCATTERING
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NEMANICH, RJ
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1980, 35-6 (JAN-) : 1203 - 1208
[6] TSAI CC, J VAC SCI TECHNOL