DEPOSITION OF CDS BY EVAPORATION THROUGH A GAS-DISCHARGE

被引：7

作者：

BERG, RS ^{[1
]}

NASBY, RD ^{[1
]}

机构：

[1] SANDIA LABS,ALBUQUERQUE,NM 87115

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1975年 / 12卷 / 01期

关键词：

D O I：

10.1116/1.568753

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：188 / 190

页数：3

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